JPH0542326Y2 - - Google Patents
Info
- Publication number
- JPH0542326Y2 JPH0542326Y2 JP18263286U JP18263286U JPH0542326Y2 JP H0542326 Y2 JPH0542326 Y2 JP H0542326Y2 JP 18263286 U JP18263286 U JP 18263286U JP 18263286 U JP18263286 U JP 18263286U JP H0542326 Y2 JPH0542326 Y2 JP H0542326Y2
- Authority
- JP
- Japan
- Prior art keywords
- slit
- laser
- reflected light
- light
- inspected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000011179 visual inspection Methods 0.000 claims description 10
- 238000006243 chemical reaction Methods 0.000 claims description 6
- 230000007547 defect Effects 0.000 description 15
- 238000010586 diagram Methods 0.000 description 5
- 102100027340 Slit homolog 2 protein Human genes 0.000 description 2
- 101710133576 Slit homolog 2 protein Proteins 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18263286U JPH0542326Y2 (en]) | 1986-11-26 | 1986-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18263286U JPH0542326Y2 (en]) | 1986-11-26 | 1986-11-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6387505U JPS6387505U (en]) | 1988-06-07 |
| JPH0542326Y2 true JPH0542326Y2 (en]) | 1993-10-26 |
Family
ID=31128611
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18263286U Expired - Lifetime JPH0542326Y2 (en]) | 1986-11-26 | 1986-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0542326Y2 (en]) |
-
1986
- 1986-11-26 JP JP18263286U patent/JPH0542326Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6387505U (en]) | 1988-06-07 |
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